Integration of Chemical Sensors with LSI Technology - History and Applications -

Chemical sensors are one of the oldest fields of research closely related to the semiconductor technology. From the IonSensitive Field-Effect Transistors (ISFET) in the 70’s, through MicroElectro-Mechanical-System (MEMS) sensors from the end of the 80’s, chemical sensors are combining in the 90’s MEMS technology with LSI intelligence to devise more selective, sensitive and autonomous devices to analyse complex mixtures. A brief history of chemical sensors from the ISFET to the nowadays LSI integrated sensors is first detailed. Then the states-of-the-art of LSI integrated chemical sensors and their wide range of applications are discussed. Finally the authors propose a brand-new usage of integrated wireless MEMS sensors for remote surveillance of chemical substances, such as food-industry or pharmaceutical products, that are stored in closed environment like a bottle, for a long period. In such environment, in-situ analyse is necessary, and electrical cables, for energy supply or data transfer, cannot be used. Thanks to integrated MEMS, an autonomous long-term in-situ quality deterioration tracking system is possible. key words: chemical sensors, MEMS technology, MEMS LSI integration, monolithic integration, wireless sensors